0102030405
6inch 150mm SSP Silicon Dummy Wafer
Core Highlights
· Production-Proven Reliability: Built for endurance in high-volume CMP and diffusion furnace processes.
· Stable Supply Chain: Dual-source manufacturing from our China and Japan sites ensures a consistent and reliable supply.
· Optimized for Manufacturing: Delivered within a predictable lead time to keep your production schedule on track.
· Yield Protection: Plays a vital role in equipment monitoring and process stabilization, directly contributing to yield preservation.
Parameter Specifications
| Grow Method | Type | Dopant | Resistivity | RRV | Orientation | Slice Orientation | Diameter Tolerance | Primary Flat Location | Primary Flat Length | Thickness | TTV | Warp | Bow | Front Side | Backside |
| CZ | P/N | Boron | 0-100 Ω·CM | 12% | <100> | ±1° | 150±0.3mm | <110>±1° | 57.5±2.5mm | 675±25um | ≦30um | ≦30um | ≦30um | Polished | Etched |



