6-Inch Silicon Dummy Wafers from China Suppliers - High-Quality Factory Production for CMP and Equipment Monitoring
Core Highlights
Built for endurance in high-volume CMP and diffusion furnace processes.
Dual-source manufacturing from our China and Japan sites ensures a consistent and reliable supply.
Delivered within a predictable lead time to keep your production schedule on track.
Plays a vital role in equipment monitoring and process stabilization, directly contributing to yield preservation.
Parameter Specifications
| Grow Method | Type | Dopant | Resistivity | RRV | Orientation | Slice Orientation | Diameter Tolerance | Primary Flat Location | Primary Flat Length | Thickness | TTV | Warp | Bow | Front Side | Backside |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| CZ | P/N | Boron | 0-100 Ω·CM | 12% | <100> | ±1° | 150±0.3mm | <110>±1° | 57.5±2.5mm | 675±25um | ≦30um | ≦30um | ≦30um | Polished | Etched |
Frequently Asked Questions
These wafers are manufactured using the Czochralski (CZ) growth method, which is the standard technique for producing high-quality monocrystalline silicon.
They are specifically optimized for chemical mechanical planarization (CMP) and diffusion furnace processes, providing essential support for equipment monitoring and process stabilization.
By producing these wafers in both our China and Japan facilities, we mitigate supply chain risks and ensure a stable, redundant supply with highly predictable delivery lead times.
The wafers are Boron-doped, P/N type, with a resistivity range of 0-100 Ω·CM and a Radial Resistivity Variation (RRV) of 12%.
The wafers have a nominal diameter of 150±0.3mm (6 inches), a thickness of 675±25um, and feature a polished front side and an etched backside. Dimensional tolerances for TTV, Warp, and Bow are all kept within ≦30um.



