0102030405
6-inch Silicon Dummy Wafers from China Suppliers - Durable Factory Solution for CMP and Equipment Monitoring
Core Highlights
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Production-Proven Reliability Built for endurance in high-volume CMP and diffusion furnace processes.
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Stable Supply Chain Dual-source manufacturing from our China and Japan sites ensures a consistent and reliable supply.
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Optimized for Manufacturing Delivered within a predictable lead time to keep your production schedule on track.
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Yield Protection Plays a vital role in equipment monitoring and process stabilization, directly contributing to yield preservation.
Parameter Specifications
| Grow Method | Type | Dopant | Resistivity | RRV | Orientation | Slice Orientation | Diameter Tolerance | Primary Flat Location | Primary Flat Length | Thickness | TTV | Warp | Bow | Front Side | Backside |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| CZ | P/N | Boron | 0-100 Ω·CM | 12% | <100> | ±1° | 150±0.3mm | <110>±1° | 57.5±2.5mm | 675±25um | <=30um | <=30um | <=30um | Polished | Etched |
Frequently Asked Questions
What are the primary applications for these silicon wafers?
These silicon wafers are specifically engineered for high-volume Chemical Mechanical Planarization (CMP) and diffusion furnace processes, offering production-proven reliability.
How is the supply chain stability guaranteed for these wafers?
We maintain a stable supply chain utilizing dual-source manufacturing from our production sites in both China and Japan, ensuring consistent availability.
What growth method and dopant are used for these wafers?
These wafers are manufactured using the Czochralski (CZ) growth method and are doped with Boron to achieve P/N type electrical properties.
What are the physical dimensions and tolerances of the wafers?
The wafers have a diameter of 150±0.3mm, a thickness of 675±25um, and a primary flat length of 57.5±2.5mm.
What are the surface specifications for the front and back sides?
The wafers feature a Polished finish on the front side and an Etched finish on the backside to meet standard processing requirements.
What are the flatness parameters (TTV, Warp, Bow) for these wafers?
The Total Thickness Variation (TTV), Warp, and Bow are all highly controlled and specified at <=30um to ensure optimal tool compatibility and yield.



