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6-inch Silicon Dummy Wafer from Reliable China Suppliers | High-Quality Factory Production for CMP and Equipment Monitoring
Core Highlights
Production-Proven Reliability
Built for endurance in high-volume CMP and diffusion furnace processes.
Stable Supply Chain
Dual-source manufacturing from our China and Japan sites ensures a consistent and reliable supply.
Optimized for Manufacturing
Delivered within a predictable lead time to keep your production schedule on track.
Yield Protection
Plays a vital role in equipment monitoring and process stabilization, directly contributing to yield preservation.
Parameter Specifications
| Grow Method | Type | Dopant | Resistivity | RRV | Orientation | Slice Orientation | Diameter Tolerance | Primary Flat Location | Primary Flat Length | Thickness | TTV | Warp | Bow | Front Side | Backside |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| CZ | P/N | Boron | 0-100 Ω·CM | 12% | <100> | ±1° | 150±0.3mm | <110>±1° | 57.5±2.5mm | 675±25um | ≦30um | ≦30um | ≦30um | Polished | Etched |
Frequently Asked Questions
What applications are these wafers optimized for?
These wafers are built for endurance and high reliability in high-volume CMP (Chemical Mechanical Planarization) and diffusion furnace processes.
How is the supply stability guaranteed?
We maintain a dual-source manufacturing supply chain with production sites in both China and Japan to ensure a consistent and uninterrupted supply.
What dopant and resistivity specifications do these wafers have?
The wafers utilize Boron as the dopant (P/N Type) with a resistivity range of 0-100 Ω·CM.
What are the physical dimension tolerances?
The wafers have a diameter tolerance of 150±0.3mm, thickness of 675±25um, and TTV, Warp, and Bow values all within ≦30um.
How do these wafers contribute to yield protection?
They play a vital role in equipment monitoring and process stabilization, which directly helps in preserving manufacturing yield.
What are the surface finishes of the front and back sides?
The front side of the wafer is polished, while the backside is etched.



